Patent · US Expired

Far infrared thermal imaging system

US6124593A · kind A · utility

9Cited by
4References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 16, 1987
Grant dateSep 26, 2000
Priority date
Expiry dateJan 16, 2007

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J2005/0077
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A far-infrared image is directed onto a transducer having a planar array of absorbing discs on one side. The discs are supported by a thin membrane ich expands and bulges as the discs heat up. The discs thus change their spacing with respect to a partially reflective mirror. The nominal spacing between the discs and mirror is about 1/4 wavelength of the infrared radiation, such that absorption is enhanced. The mirror is supported on a transparent substrate through which visible or near-infrared light is shown, and carries a perforated mask atop an insulating layer and in registration with the discs. The mirror/discs thus establish a Fabry-Perot cavity for the visible or near-infrared light, whereby a visible or near-infrared image may be observed or detected as the various discs establish various spacings in accordance with incremental variations in the infrared image. An electrostatic field is established between the mirror and the shield by a voltage source. This field induces an electrostatic field in the discs to pre-bias the discs toward the mirror and thus to tune or adjust the sensitivity of the transducer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.