Apparatus and process for delivering an abrasive suspension for the mechanical polishing of a substrate
US6125876A · kind A · utility
8Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 29, 1998 |
| Grant date | Oct 3, 2000 |
| Priority date | — |
| Expiry date | Dec 29, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/4807
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for delivering abrasive suspensions includes a reservoir containing an abrasive suspension, a loop for delivering the abrasive suspension to a point of use, the loop being connected to the reservoir, a pumping arrangement for circulating the abrasive suspension in the loop and for ensuring its return into the reservoir, the loop and the reservoir being arranged for recovering the abrasive suspension after circulation in the loop at a recovery point of the reservoir, and a control system for controlling the pumping arrangement so as to maintain a continuous circulation of the suspension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.