Apparatus for removing harmful components in a semiconductor exhaust gas
US6126906A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 19, 1998 |
| Grant date | Oct 3, 2000 |
| Priority date | — |
| Expiry date | Oct 19, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus for removing harmful components in a semiconductor exhaust gas includes: a first water scrubber for washing with water a gas to be processed; a gas decomposer tower disposed downstream of the first water scrubber; a second water scrubber disposed downstream of the gas decomposer tower; and a burner tower disposed downstream of the second water scrubber for burning the processed gas, wherein the gas decomposer tower is capable of thermally decomposing a mixture gas of a saturated or unsaturated hydrocarbon gas and a perfluorocarbon or a perfluoride compound by maintaining the mixture gas at a temperature of 600.degree. C. or more in the absence of separated O.sub.2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.