Apparatus and method for supplying material to a substrate
US6127082A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 12, 1998 |
| Grant date | Oct 3, 2000 |
| Priority date | — |
| Expiry date | Jan 12, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/15
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and method are described for supplying material to a substrate (109). The apparatus includes a member (3) having a surface with a plurality of features (8) which locate, in use, menisci of a liquid (1) supplied to the member. An actuator (4) induces mechanical vibrations within the liquid located by the features to cause liquid droplets (7) to be sprayed. Liquid (1) is supplied to the member and electrical charge is supplied to the member and electrical charge is supplied to the liquid by, for example, an electrode (14). Electrical charge or potential is also supplied to the substrate (109) so that the droplets are directed towards the substrate to deposit material thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.