Patent · US Expired

Manufacturing method of active matrix substrate, active matrix substrate and liquid crystal display device

US6127199A · kind A · utility

373Cited by
10References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 10, 1998
Grant dateOct 3, 2000
Priority date
Expiry dateJul 10, 2018

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3025
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of manufacturing an active matrix substrate is provided that uses a technique of transferring a thin film device. In forming thin film transistors and pixel electrodes on an original substrate before transfer, an insulator film such as an interlayer insulation film or the like, is previously removed before the pixel electrodes are formed. Further, the original substrate is separated by exfoliation to transfer the device to a transfer material to cause the pixel electrodes to partially appear in the surface or the vicinity of the surface of the device. This portion permits application of a voltage to a liquid crystal through the pixel electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.