System for evaluating thin film coatings
US6128087A · kind A · utility
7Cited by
11References
2Claims
0Family size
Inventors
Key dates
| Filing date | May 8, 1998 |
| Grant date | Oct 3, 2000 |
| Priority date | — |
| Expiry date | May 8, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/547
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system for evaluating the reflectance of an object (e.g., a CRT) that is coated with an anti-reflective coating material is disclosed. The quality and/or uniformity of the coating is evaluated by a reflectometer. The reflectometer is positioned relative to the object by non-contact sensors. Reflectance data gathered by the reflectometer is analyzed to determine to what extent the actual coating differs from the optimal (i.e., ideal) coating. A feedback system modifies the coating process for subsequent objects in an attempt to fine-tune the coating process and achieve optimal anti-reflective coatings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.