Catalyst-containing photo-oxidation device, and water treatment system of a semiconductor device fabrication line employing said device
US6129845A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 1998 |
| Grant date | Oct 10, 2000 |
| Priority date | — |
| Expiry date | Oct 7, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S210/90
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
A photo-oxidation device of a water treatment system photo-oxidizes organic material, in particular, aromatic organic material, in the water to facilitate its removal from the water. The photo-oxidation device includes a UV lamp, a flow channel in which the UV lamp is disposed, and a catalyst of an oxidation reaction between an organic material and the UV radiation emitted by the UV lamp. The UV radiation emitted from the UV lamp illuminates the flow channel while the water passes through the flow channel. The catalyst, on the other hand, is fixed to an inner wall of the flow channel to foster the oxidation of the organic material by the UV radiation. The water treatment system in which the photo-oxidation device is incorporated, includes a pre-treatment unit having particle filters, a first treatment section, and a second treatment section. The first treatment section has a reverse osmosis unit in which salts are removed from the water, a gas treatment unit in which gases are removed form the water, a first one of the photo-oxidation devices, and an ion-exchange unit in which ions are removed from the water. The second treatment section has a second photo-oxidation device, a secon…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.