Chemical sensor based on porous silicon

US6130748A · kind A · utility

Assignee

• Forschungszentrum Jülich GmbH · DE

Inventors

• Michael Kruger · Aachen, DE
• Michael Berger · Bad Vilbel, DE
• Markus Thonissen · Nettetal, DE
• Rüdiger Arens-Fischer · Aachen, DE
• Hans Luth · Aachen, DE

Key dates

• Filing date: Sep 4, 1998
• Grant date: Oct 10, 2000
• Expiry date: Sep 4, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/41
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In an analytic process using porous silicon, a substance is detected or its concentration in a fluid is determined based on the change in the optical property of porous silicon as a function of the refractive index of the substance present in the pores of the porous silicon, or of the fluid containing the substance. An analytic device for detecting a substance or for determining the concentration of a substance in a fluid with the use of porous silicon comprises a component at least partly consisting of porous silicon, the optical property of which is dependent upon the refractive index of the substance or of the fluid containing the substance, whereby a change in the optical property of the porous silicon is measurable to indicate detection of the substance or to determine the concentration of such substance in the pores of the porous silicon.