Mold method for forming vacuum field emitters and method for forming diamond emitters
US6132278A · kind A · utility
30Cited by
21References
50Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 25, 1997 |
| Grant date | Oct 17, 2000 |
| Priority date | — |
| Expiry date | Jun 25, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/30457
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Diamond microtip field emitters are used in diode and triode vacuum microelectronic devices, sensors and displays. Diamond diode and triode devices having integral anode and grid structures can be fabricated. Ultra-sharp tips are formed on the emitters in a fabrication process in which diamond is deposited into mold cavities in a two-step deposition sequence. During deposition of the diamond, the carbon graphite content is carefully controlled to enhance emission performance. The tips or the emitters are treated by post-fabrication processes to further enhance performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.