Apparatus for detecting radiation and method for manufacturing such apparatus
US6133614A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 27, 1996 |
| Grant date | Oct 17, 2000 |
| Priority date | — |
| Expiry date | Aug 27, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/8057
Abstract
A method for manufacturing a semiconductor apparatus for detecting radiation provided with phosphor comprises the steps of forming a phosphor layer integrally with a meshed partition plate having partitions per pixel of the semiconductor apparatus for detecting radiation, and of separating the phosphor per pixel by removing the phosphor on the partitioning portion of the partition plate by the irradiation of laser beam in the form of grooves together with the surface layer of the partitioning portions in order to make the phosphor thick to obtain a higher sensitivity, and also to make pixel pitches finer to enhance resolution, thus obtaining exact images without creating any cross talks between pixels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.