Angular velocity sensor
US6134961A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 1999 |
| Grant date | Oct 24, 2000 |
| Priority date | — |
| Expiry date | Jun 24, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular velocity sensor includes coupling beams supported afloat by highly flexible support beams so as to be movable relative to a substrate, with the support beams being flexible in the x-axis and a y-axis directions and being symmetrical with respect to the center of the sensor. A first vibrator and a second vibrator are supported by respective coupling beams through spring beams that are highly flexible in the x-direction, with the spring beams being symmetrical with respect to the x-axis passing through the center symmetrical to each other with respect to the y-axis passing through the center. Drive electrodes drive at least one of the first vibrator and the second vibrator to vibrate in the x-direction. First displacement detection electrodes detect a y-directional vibration of the first vibrator and second displacement detection electrodes detect a y-directional vibration of the second vibrator. Precision with respect to detecting the angular velocity is prevented from being lowered by electrical and mechanical disturbances.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.