Polymer-based micromachining for microfluidic devices
US6136212A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 6, 1997 |
| Grant date | Oct 24, 2000 |
| Priority date | — |
| Expiry date | Aug 6, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/10155
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to polymer-based micro-electro-mechanical system (MEMS) technology suitable for the fabrication of integrated microfluidic systems, particularly medical and chemical diagnostics system, ink-jet printer head, as well as any devices that requires liquid- or gas-filled cavities for operation. The integrated microfluidic systems may consist of pumps, valves, channels, reservoirs cavities, reaction chambers, mixers, heaters, fluidic interconnects, diffusers, nozzles, and other microfluidic components on top of a regular circuit substrate. This technology is vastly superior than any alternatives available such as glass-based, polysilicon-based MEMS technology as well as hybrid `circuit board` technology because of its simple construction low cost, low temperature processing, and its ability to integrate any electronic circuitry easily along with the fluidic parts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.