Patent · US Expired

Thin film transistors

US6136702A · kind A · utility

32Cited by
5References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 29, 1999
Grant dateOct 24, 2000
Priority date
Expiry dateNov 29, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K71/621
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The specification describes source/drain contact material that is compatible with organic semiconductors in thin film transistor integrated circuits. The contact material is nickel/gold wherein the nickel is plated as Ni--P on a base conductor, preferably TiN.sub.x, by electroless plating, and the gold overlay is deposited by displacement plating. It was found, unexpectedly, that forming Ni/Au contacts in this way extends the lifetime of TFT devices substantially.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.