Piezoelectric actuator using passivation film or interlayer insulating film along with an insulating film to obtain better adhesion
US6142614A · kind A · utility
20Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 6, 1997 |
| Grant date | Nov 7, 2000 |
| Priority date | — |
| Expiry date | Nov 6, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14491
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
Lower electrodes are disposed independently of each other for respective ink cavities through a silicon oxide film on a silicon substrate. PZT films and upper electrodes are disposed on the respective lower electrodes, and then an interlayer insulating film or a passivation film is disposed on top of the whole layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.