Patent · US Expired

Method for making a ceramic to metal hermetic seal

US6145731A · kind A · utility

7Cited by
27References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 17, 1999
Grant dateNov 14, 2000
Priority date—
Expiry dateNov 17, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/50
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

To hermetically seal an optically transparent ceramic or glass member to a metallic housing, an aperture with a diameter less than the diameter of the member is formed through the metallic housing. The member is then press-fit into the aperture, partially displacing metal from the walls of the aperture, forming an inner burr circumscribing the aperture. The walls of the aperture and the circumscribing burr are then coated with a second metal, preferably electroless nickel. The resultant seal maintains hermeticity following thermal cycling and is particularly suited for the manufacture of a hybrid electronic package having an optical or opto-electronic coupling.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.