Structures and components thereof having a desired surface characteristic together with methods and apparatuses for producing the same
US6146462A · kind A · utility
90Cited by
57References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 1999 |
| Grant date | Nov 14, 2000 |
| Priority date | — |
| Expiry date | May 7, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32596
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus for plasma modifying a substrate are disclosed along with associated techniques for applying coatings to the substrate. Particular utility has been found using a hollow cathode to generate the plasma along with magnetic focusing means to focus the plasma at the surface of a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.