Patent · US Expired

Transparent conductive film and method for its production, and sputtering target

US6146765A · kind A · utility

10Cited by
6References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 18, 1997
Grant dateNov 14, 2000
Priority date
Expiry dateAug 18, 2017

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/31667
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A transparent conductive film of a zinc oxide type containing gallium and silicon, which contains silicon in an amount of from 0.01 to 1.5 mol % in terms of SiO.sub.2.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.