Piezoelectric film element and manufacturing method thereof, and ink jet recording head
US6147438A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jun 22, 1998 |
| Grant date | Nov 14, 2000 |
| Priority date | — |
| Expiry date | Jun 22, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/8554
Abstract
The present invention provides a piezoelectric film element with improved adhesion between a first protective film and a substrate. This invention also provides a method of manufacturing a piezoelectric film element, which makes it possible to selectively form, by a hydrothermal synthesis, a piezoelectric film with excellent piezoelectric properties in a specified area. This piezoelectric element comprises, over a substrate 12: a piezoelectric film; a common electrode and an individual electrode located to hold the piezoelectric film in between; a first protective film 14 which is formed over almost the entire surface of the substrate 12 and which protects the substrate 12 to avoid the formation of the piezoelectric film directly over the substrate 12; and a base film 16 which is formed over the first protective film 14 in the area for forming the piezoelectric film, and which functions as a base when the piezoelectric film is caused to grow to be formed. The piezoelectric film is formed over the base film 16.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.