High speed deformable mirror light valve
US6147789A · kind A · utility
77Cited by
18References
9Claims
0Family size
Inventor
Key dates
| Filing date | May 4, 1998 |
| Grant date | Nov 14, 2000 |
| Priority date | — |
| Expiry date | May 4, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A deformable mirror light valve comprised of an array of silicon nitride ribbons, metalized to reflect light. Each ribbon is electrostatically deformed to form a cylindrical mirror. Each deformable ribbon modulates the light of one pixel by focusing the reflected light through a slit. An alternative embodiment focuses the light onto a stop. The ribbon structure has a fast response time combined with high contrast.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.