Patent · US Expired

High speed deformable mirror light valve

US6147789A · kind A · utility

77Cited by
18References
9Claims
0Family size

Inventor

Key dates

Filing dateMay 4, 1998
Grant dateNov 14, 2000
Priority date
Expiry dateMay 4, 2018

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S359/90
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A deformable mirror light valve comprised of an array of silicon nitride ribbons, metalized to reflect light. Each ribbon is electrostatically deformed to form a cylindrical mirror. Each deformable ribbon modulates the light of one pixel by focusing the reflected light through a slit. An alternative embodiment focuses the light onto a stop. The ribbon structure has a fast response time combined with high contrast.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.