Acceleration sensor and triaxial acceleration sensor
US6148671A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 28, 1998 |
| Grant date | Nov 21, 2000 |
| Priority date | — |
| Expiry date | Sep 28, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acceleration sensor capable of restraining a reduction in output thereof due to an electrostatic capacity between acceleration detecting electrodes and output electrodes. A low-dielectric layer is arranged between a connection line and a piezoelectric ceramic substrate. Another low-dielectric layer is arranged between additional connection lines and output electrodes, and the substrate. The low-dielectric layers are formed of a material substantially reduced in relative dielectric constant as compared with the substrate. The low-dielectric layers reduce an electrostatic capacity generated between wiring patterns and the output electrodes, and a counter electrode pattern, to thereby reduce the amount of spontaneous polarization charges accumulated in the electrostatic capacity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.