Pellicle
US6149992A · kind A · utility
20Cited by
1References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 19, 1998 |
| Grant date | Nov 21, 2000 |
| Priority date | — |
| Expiry date | Oct 19, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/64
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention makes it possible to provide a pellicle having, on the inside of the pellicle frame, a tacky layer which exhibits excellent performance for holding foreign matters such as dust or dirt suspended in space defined by the pellicle and the mask, and resistance against light of short wavelengths such as excimer beam. The pellicle comprises a pellicle frame, a pellicle film stretched on one side of said pellicle frame, and a tacky layer formed on the inside of said pellicle frame and containing a greasy fluorine-contained resin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.