Energy filter and electron microscope equipped with the energy filter
US6150657A · kind A · utility
18Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 1998 |
| Grant date | Nov 21, 2000 |
| Priority date | — |
| Expiry date | Aug 25, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.