Optical sensor with telecentric optics
US6151117A · kind A · utility
7Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 30, 1999 |
| Grant date | Nov 21, 2000 |
| Priority date | — |
| Expiry date | Aug 30, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03G2215/00759
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate sensor system having a light source for radiating light toward a substrate position, a light sensor system positioned to receive light transmitted or reflected at the substrate, a lens that images the light transmitted or reflected at the substrate onto the light sensor system, and a telecentric stop between the lens and the light sensor system. Beneficially, such substrate sensor systems will include an electrical circuit that produces position information regarding the position of a substrate and/or the position of an image on a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.