Patent · US Expired

Wide dynamic range capacitive transducer

US6151967A · kind A · utility

84Cited by
9References
36Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 10, 1998
Grant dateNov 28, 2000
Priority date
Expiry dateMar 10, 2018

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2203/0392
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A variable area capacitor with a flexible electrode responsive to a physical effect and a rigid electrode with a predetermined surface contour. The surface contour is dimensioned to provide a specific change in capacitance with deflection of the flexible electrode. A thin dielectric layer maintains a substantially fixed spacing between the two electrodes. Preferred embodiments include a pressure sensor, microphone and accelerometer. A differential transconductance amplifier detects changes of the variable capacitor in a low-impedance, bridge-like circuit and feeds back current to balance the bridge. The voltage that controls the feedback current is proportional to capacitance over a wide dynamic range.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.