Process gas supply unit
US6152175A · kind A · utility
26Cited by
12References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1998 |
| Grant date | Nov 28, 2000 |
| Priority date | — |
| Expiry date | Jun 3, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.