Method of forming a projection having a micro-aperture, projection formed thereby, probe having such a projection and information processor comprising such a probe
US6156215A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 1998 |
| Grant date | Dec 5, 2000 |
| Priority date | — |
| Expiry date | Aug 24, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A projection having a micro-aperture is formed by formiNg a dent having a pointed front end on a substrate, then depositing a light blocking material on the substrate except the front end of the dent, and peeling off the light blocking material from the substrate. The projection is suited as an optical probe of scanning near-field optical microscope (SNOM) for detecting or emitting light through the micro-aperture. For this purpose, the projection is formed on the end of a cantilever or on the end of an optical fiber. The dent having a pointed front end can be formed typically by patterned crystal-axis-anisotropic etching of a silicon substrate and subsequent thermal oxidation of the silicon surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.