Spatially modulated detector for radiation

US6157035A · kind A · utility

Assignee

• IMEC · BE

Inventors

• Maarten Kuijk · Berchem, BE
• Paul Heremans · Leuven, BE
• Daniel Coppee · Schoten, BE
• Roger Vounckx · Schaerbeek - Schaarbeek, BE

Key dates

• Filing date: Apr 30, 1998
• Grant date: Dec 5, 2000
• Expiry date: Apr 30, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F39/103

Abstract

A novel radiation detector, a detection principle and an associated structure are provided for semiconductor substrate detectors in general and for CMOS based circuits in particular. For an optical detector, photons absorbed in the neutral zone of the substrate generate electron hole pairs that migrate by diffusion. A shadow mask gives a spatial modulation to the incident, and consequently, to the absorbed light in the semiconductor substrate. By measuring the magnitude of the spatial frequency component in the minority carrier distribution with a spatial frequency corresponding to that of the shadow mask, a fast detector is conceived. A shadow mask with higher spatial modulation frequency delivers a faster turn-off. The combination of a plurality of these detectors with an image fiber forms a basic system for constructing high-speed parallel optical interconnects between chips.