Patent · US Expired

Apparatus and method for controlling fluid in a micromachined boiler

US6160243A · kind A · utility

31Cited by
12References
12Claims
0Family size

Assignee

Inventor

Key dates

Filing dateSep 25, 1998
Grant dateDec 12, 2000
Priority date
Expiry dateSep 25, 2018

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/48091
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

A micromachined fluid control apparatus includes a micromachined boiler with a thermally conductive housing that has a housing exterior surface and a housing interior surface. The housing interior surface defines an interior void that has a fluid positioned within it. A heat source is incorporated with the housing exterior surface. The heat source selectively generates heat that is conducted through the thermally conductive housing so as to selectively expand the fluid in a predetermined manner. A load resistor may be positioned within the thermally conductive housing. Current may be driven through the load resistor in a predetermined manner to further control the selective expansion of the fluid.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.