Apparatus and method for controlling fluid in a micromachined boiler
US6160243A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 25, 1998 |
| Grant date | Dec 12, 2000 |
| Priority date | — |
| Expiry date | Sep 25, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48091
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A micromachined fluid control apparatus includes a micromachined boiler with a thermally conductive housing that has a housing exterior surface and a housing interior surface. The housing interior surface defines an interior void that has a fluid positioned within it. A heat source is incorporated with the housing exterior surface. The heat source selectively generates heat that is conducted through the thermally conductive housing so as to selectively expand the fluid in a predetermined manner. A load resistor may be positioned within the thermally conductive housing. Current may be driven through the load resistor in a predetermined manner to further control the selective expansion of the fluid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.