Vertical cavity surface emitting lasers with consistent slope efficiencies
US6160834A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 25, 1999 |
| Grant date | Dec 12, 2000 |
| Priority date | — |
| Expiry date | Jan 25, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0427
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A vertical cavity surface emitting laser (VCSEL) with variable tuning layer for adjusting the slope of the laser and method for manufacturing the same are disclosed. In practice, a VCSEL wafer is grown by any conventional technique, and fabricated into discrete lasers while maintained in wafer form. The initial lasers are then tested to determine characteristics, such as the slope efficiency distribution. A variable thickness dielectric layer is then deposited which is calculated to tune the slope efficiency distribution to within a target specification by altering the phase of the top facet reflectivity of the initial lasers. The resulting change in transmission directly changes the laser slope in a predictable fashion. The tuning step may be repeated, if necessary, to further refine the slope to the desired value. The method produces VCSELs with similar or consistent slopes from a plurality of wafers. Also disclosed are an optical subassembly and optical transceiver incorporating the improved VCSELs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.