Transporting apparatus for semiconductor device
US6163145A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Aug 27, 1997 |
| Grant date | Dec 19, 2000 |
| Priority date | — |
| Expiry date | Aug 27, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06705
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transporting apparatus used in testing a plurality of semiconductor devices includes a magazine in which a plurality of pallets are stacked in plural stages, each pallet with a plurality of semiconductor device placed thereon; a distributing stocker mechanism for placing the plurality of pallets in the magazine onto a carrier; a carrier transporting mechanism for transporting the carrier into a test station in a constant temperature room and transporting the carrier after to outside the constant temperature room; and a recovery stocker mechanism for recovering the plurality of pallets after test on the carrier into the magazine. Thus, the transporting apparatus with high installing area efficiency and high test efficiency can be fabricated at low production cost.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.