Photodetector and method for manufacturing it
US6166365A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jul 16, 1998 |
| Grant date | Dec 26, 2000 |
| Priority date | — |
| Expiry date | Jul 16, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J43/24
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A photosensor comprises a cathode portion (111) sensitive to radiation and/or particles, an anode portion (114) receiving electrons, an evacuated channel (112, 113, 200) having the cathode portion attached to its one end portion in a vacuum-tight manner and the anode portion attached to its other end portion in a vacuum-tight manner, a conductive or semiconductive layer (107) at least partially covering the inner surface of the evacuated channel, wherein the channel is formed of a tubular member (106). A method of manufacturing a channel electron multiplier comprises the steps of forming a tubular member and a conductive or semiconductive layer at least on parts of its inner surface, forming an anode portion and sealing it to the tubular member, evacuating the tubular member, forming a cathode portion sensitive to radiation and/or particles, and sealing the cathode portion to the evacuated tubular member. The detector may at least partially be packed into a casting compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.