Bistable microactuator with coupled membranes

US6168395A · kind A · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Hans-Joachim Quenzer · Berlin, DE
• Bernd Wagner · Looft, DE

Key dates

• Filing date: Oct 13, 1998
• Grant date: Jan 2, 2001
• Expiry date: Oct 13, 2018

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01H2001/0042
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A bistable electrostatic actuator with pneumatic or liquid coupling. The actuator has enclosed metallic electrodes. It can be used for a microvalve or micropump. The actuator has buckled membrane sections in pairs and curved substrate electrodes, locally associated with said membrane sections.