Method of producing a zirconia diaphragm structure
US6168680A · kind A · utility
2Cited by
20References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 21, 1998 |
| Grant date | Jan 2, 2001 |
| Priority date | — |
| Expiry date | Oct 21, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/163
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A zirconia diaphragm structure, and a method of producing such structure. The zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-3.0% by weight of alumina, 0.1-3.0% by weight of silica, 0.1-5.0% by weight of alumina and silica, 0.1-5.0% by weight of alumina and magnesia, or 0.1-5.0% by weight of alumina, silica and magnesia.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.