Patent · US Expired

Apparatus for coating a substrate

US6168698A · kind A · utility

8Cited by

11References

3Claims

0Family size

Assignee

Balzers und Leybold Duetschland Holding AG · DE

Inventors

Joachim Szczyrbowski · Goldbach, DE
Gotz Teschner · Hanau, DE
Anton Zmelty · Hösbach, DE

Key dates

Filing date	Oct 22, 1996
Grant date	Jan 2, 2001
Priority date	—
Expiry date	Oct 22, 2016

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/0206
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Power supply lines (41, 42) connect poles of an alternating current power source (43) to respective cathodes (58, 59) in compartments (32, 39), included among a plurality of adjacent compartments (32-39'), which together form a vacuum chamber (31) and which are connected to each other by a passageway (60). The two compartments (32, 39) with the cathodes (58, 59) are separated from each other by intermediate compartments (32'-38'), at least some of which are equipped with additional sputter cathodes (61-66).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.