Anti-vibration apparatus and anti-vibration method thereof
US6170622A · kind A · utility
42Cited by
6References
46Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 6, 1998 |
| Grant date | Jan 9, 2001 |
| Priority date | — |
| Expiry date | Mar 6, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D19/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An anti-vibration apparatus is equipped with a plurality of active support legs which support an anti-vibration table and which are able to actively operate to control the motion of the anti-vibration table in a horizontal plane. The apparatus is further equipped with a pressure feedback loop for detecting the internal pressure of an air spring provided in each of the plurality of active support legs and for feeding a signal, which is based on the detected internal pressure of the air spring, back to the control system of the anti-vibration apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.