Method and system for measuring particles in a liquid sample
US6172376A · kind A · utility
7Cited by
26References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1998 |
| Grant date | Jan 9, 2001 |
| Priority date | — |
| Expiry date | Sep 14, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/054
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are a method and apparatus for measuring particles in a liquid sample. The method involves introducing a liquid sample into a heat exchanger, thereby cooling the sample to a predetermined temperature. A particle measurement is performed on the cooled sample by introducing the cooled sample into a particle detector. The method and apparatus in accordance with the invention effectively suppress bubbles present in a liquid chemical sample being measured, thereby allowing for accurate particle measurements. The invention has particular applicability in the semiconductor and pharmaceutical manufacturing industries.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.