Method and apparatus for simultaneously interferometrically measuring optical characteristics in a noncontact manner
US6172752A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 5, 1997 |
| Grant date | Jan 9, 2001 |
| Priority date | — |
| Expiry date | Aug 5, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Light from a light source is converged by a converging lens and is irradiated to an object to be measured through a converging lens, the object to be measured or the converging lens and the reference light mirror are displaced so as to maximize intensities of interference light at the reference light mirror and the front and rear surfaces of the object to be measured, and displaced distances of the object to be measured or the converging lens and the reference light mirror at a position where an intensity of interference light becomes maximum at the rear surface and a position where an intensity of interference light becomes maximum are obtained in order to simultaneously measure a refractive index and a thickness of the object to be measured. With this arrangement, simultaneous measurement of a phase index and a thickness of an object to be measured, simultaneous measurement of a birefringence and a thickness of an object to be measured, and a phase index and a group index of an object to be measured can be carried out.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.