Procedure for regulating the temperature of a material to be processed in a processing chamber and device to accomplish this
US6173903A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 18, 1998 |
| Grant date | Jan 16, 2001 |
| Priority date | — |
| Expiry date | Dec 18, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B9/03
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
To regulate the temperature in the processing chamber of an incubator with a fault protection function, two temperature sensors are provided to measure actual temperatures or rather sensor signals, and they and their associated peripherals undergo a plausibility check during which the sensor signals may not exceed a specified difference. if the plausibility condition is met and if an error in the feedback control circuit, for example a permanently closed contact of the temperature stabilization actuator, should cause the temperature sensor signal value (actual value) to exceed or fall below a specified error tolerance band about a desired value, then control is transferred from a first feedback control circuit to a primary feedback control circuit with a controller/monitoring device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.