Patent · US Expired

Procedure for regulating the temperature of a material to be processed in a processing chamber and device to accomplish this

US6173903A · kind A · utility

3Cited by
7References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 18, 1998
Grant dateJan 16, 2001
Priority date
Expiry dateDec 18, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG05B9/03
  • WIPO fieldControl
  • WIPO sectorInstruments

Abstract

To regulate the temperature in the processing chamber of an incubator with a fault protection function, two temperature sensors are provided to measure actual temperatures or rather sensor signals, and they and their associated peripherals undergo a plausibility check during which the sensor signals may not exceed a specified difference. if the plausibility condition is met and if an error in the feedback control circuit, for example a permanently closed contact of the temperature stabilization actuator, should cause the temperature sensor signal value (actual value) to exceed or fall below a specified error tolerance band about a desired value, then control is transferred from a first feedback control circuit to a primary feedback control circuit with a controller/monitoring device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.