Micromechanical component production method

US6174416A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Horst Magenau · Gerlingen, DE
• Frank Schatz · Kornwestheim, DE
• Armin Glock · Neukirchen, DE
• Elke Krauss · Ditzingen, DE
• Thomas Schittny · Steinheim an der Murr, DE
• Alexandra Jauernig · Yokohama, JP
• Ronald Glas · Braunschweig, DE

Key dates

• Filing date: Oct 19, 1999
• Grant date: Jan 16, 2001
• Expiry date: Oct 19, 2019

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01H1/0036
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Micromechanical component and a method for its production having vertically arranged layers made of metallic materials, with the layers adhering firmly to one another at least in part. The layers of the micromechanical component are attached to each other via intermediate layers, with the intermediate layers being at least one sputtered layer which can be applied in the form of a metallic start plating to the underlying layer, which includes metallic and nonmetallic areas, and to which an upper metallic electroplated layer can be applied. Upon their completion, the layers yield the micromechanical component with layers that adhere to one another or layers which can be partially detached from one another.