Fabrication of multiple-wavelength vertical-cavity opto-electronic device arrays
US6174749A · kind A · utility
16Cited by
12References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 13, 1998 |
| Grant date | Jan 16, 2001 |
| Priority date | — |
| Expiry date | May 13, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/8142
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides multiple-wavelength vertical-cavity surface-emitting laser ("MW-VCSEL") arrays. These arrays are fabricated in a molecular beam epitaxy system or the like using two patterned-substrate growth techniques. The growth techniques can be used with an in-situ laser reflectometry. In one embodiment, a temperature dependent growth rate to create the devices is provided. In an alternative aspect, uniform growth is performed followed by a temperature-dependent desorption technique. These techniques provided desired wavelength span and desired characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.