Closed-loop planar linear motor with integral monolithic three-degree-of-freedom AC-magnetic position/orientation sensor
US6175169A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 1999 |
| Grant date | Jan 16, 2001 |
| Priority date | — |
| Expiry date | May 3, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20201
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention discloses a closed loop planar linear motor which includes a stationary stator (or platen) of arbitrary extent, and a moving forcer which is a single rigid body that can move over the planar stator surface on an air bearing with high speed and high precision in two orthogonal translational directions and a small rotation (or combinations thereof). An important distinguishing feature is a monolithic position and orientation sensor based on alternating current (AC) magnetic techniques which is an integral part of the forcer and occupies otherwise unused space in the forcer body. Also incorporated within the forcer is a special electronic processing element which converts weak AC signals from the sensor into usable high precision position and orientation information relative to the stator surface. A unique controller which is part of the closed-loop linear motor acts to combine information from the AC magnetic sensor with input from a user to provide precise, high-performance closed-loop control of the forcer, thereby enabling the forcer to be positioned with sub-micrometer precision and oriented with sub-millidegree precision on the stator surface. Additionally, owing t…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.