Process for coating substrates with a silicium-containing layer

US6177136A · kind A · utility

Assignee

• BAYER HEALTHCARE LLC · DE

Inventors

• Hans-Peter Baldus · Burscheid, DE
• Gerd Passing · Wermelskirchen, DE
• Lothar Schonfelder · Coburg, DE
• Rolf Meistring · Glonn, DE
• Hannelore Benien · Hersbruck, DE
• Marc Haltrich · Bad Aibling, DE

Key dates

• Filing date: Feb 26, 1999
• Grant date: Jan 23, 2001
• Expiry date: Feb 26, 2019

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02T50/60
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A process for coating substrates with a silicon-containing protective layer by chemical vapor deposition with a silicon-containing compound of the structural formula (1): ##STR1## in which PA1 R.sup.1 is an alkyl group having 1 to 4 carbon atoms, and PA1 R.sup.2 is hydrogen or an alkyl group having 1 to 4 carbon atoms.