Method and apparatus for using shuttered windows in a micro-electro-mechanical system
US6177800A · kind A · utility
42Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 10, 1998 |
| Grant date | Jan 23, 2001 |
| Priority date | — |
| Expiry date | Nov 10, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R15/165
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A windowed shutter on a micro-electro-mechanical system improves output current of a non-contacting electrostatic voltmeter. The output current is increased by increasing the area modulated by the micro-electro-mechanical shutter system and by increasing the speed of that modulation. The increase in the area modulated by the windowed shutter is in direct proportion to the number of windows used. Moreover, the speed of the modulation is increased by increasing the resonant frequency of the system. Less shutter mass increases the frequency thus increasing shutter movement over time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.