Micromechanical membrane tilt-mirror switch
US6178033A · kind A · utility
34Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 28, 1999 |
| Grant date | Jan 23, 2001 |
| Priority date | — |
| Expiry date | Mar 28, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/357
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromechanical tilt mirror device that includes a membrane suspended by its ends over a substrate such that a mirror area of the membrane is asymmetrically positioned on the membrane whereby it is tilted when the membrane is deformed by electrostatic forces. This mirror tilt is used to steer an incident light beam in a prescribed direction. The mirror can be supported to provide tilt in either of two orthogonal directions with respect to a rest direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.