Vibration distortion removal for scanning probe microscopes
US6178813A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 17, 1999 |
| Grant date | Jan 30, 2001 |
| Priority date | — |
| Expiry date | Nov 17, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for improving images of surface features of a sample, constructed by a scanning probe microscope, includes constructing images of surface features of a sample with a scanning probe microscope; measuring a displacement of the sample that occurs during the constructing step; and correcting the images using the measured displacement. An apparatus for improving images of surface features of a sample, constructed by a scanning probe microscope, includes a vacuum chamber; a sample holder disposed in the vacuum chamber; at least one spring connected between the vacuum chamber and the sample holder; at least one magnet disposed in the vacuum chamber for damping vibrations of the sample holder; a probe and piezo tube assembly disposed in the vacuum chamber for scanning surface features of a sample; and an interferometer disposed in the vacuum chamber wherein the interferometer measures a distance between the sample and a point fixed with respect to the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.