Microejector pump

US6179584A · kind A · utility

Assignee

• GeSim—Gesellschaft für Silizium-Mikrosysteme mbH · DE

Inventors

• Steffen Howitz · Dresden, DE
• Thomas Wegener · Neuruppin, DE
• Mario Burger · Pirna, DE
• Thomas Gehring · Scarborough, CA

Key dates

• Filing date: Jun 10, 1999
• Grant date: Jan 30, 2001
• Expiry date: Jun 10, 2019

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F04B53/08
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

A microejector pump for generating microdrops includes at least one pump chamber configured in a silicon chip and a piezoelectrically actuable silicon membrane arranged over the pump chamber. The pump chamber is connected to at least one supply line as well as a discharge line provided with an ejection orifice. A glass chip closes off at least the pump chamber from the silicon membrane. The microejector pump can also include an integral heater and controller.