Compact external torch assembly for semiconductor processing
US6179609A · kind A · utility
3Cited by
7References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1999 |
| Grant date | Jan 30, 2001 |
| Priority date | — |
| Expiry date | Jul 2, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF23D2208/10
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A compact torch for use in semiconductor processing which may be used both to produce steam and to perform wet or dry dichlorethylene (DCE) oxidation at varying concentrations with no reconfiguration of the torch, providing full temperature of control of the oxidation product gases, with redundancy to provide automatic backup of heating and ignition elements, and with non-mechanical flow control of the oxidation product gases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.