Deposition apparatus for an organic thin-film light-emitting element
US6179923A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 18, 1998 |
| Grant date | Jan 30, 2001 |
| Priority date | — |
| Expiry date | Aug 18, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/568
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A deposition apparatus is used for depositing a layer of an organic thin-film light-emitting element on a substrate. The apparatus is formed of a vacuum chamber for depositing the layer for constituting the organic thin-film light-emitting element on the substrate, a set of parts disposed in the vacuum chamber for depositing the layer on the substrate and including a source for the layer, and a supporting member for supporting the set of parts so that the set of parts is replaceably disposed in the chamber. A dust of a material disposed in the source and evaporated therefrom is adhered to the set of parts, but the set of parts can be replaced easily. Thus, the apparatus can be operated efficiently.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.