Method of manufacture of a thermally actuated ink jet including a tapered heater element
US6180427A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 10, 1998 |
| Grant date | Jan 30, 2001 |
| Priority date | — |
| Expiry date | Jul 10, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14346
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of manufacture of an ink jet printing nozzle arrangement on a wafer is disclosed, the arrangement including: an ink chamber having an ink ejection nozzle in one wall thereof for the ejection of ink from the ink chamber; a moveable paddle vane located within the ink chamber, the paddle vane including a concave surface in the area adjacent the ink ejection nozzle; and an actuator means adapted to move the paddle vane so as to cause ink within the ink chamber to be ejected from the ink ejection nozzle; the method comprising the steps of; PA1 (a) starting with a silicon wafer layer having requisite circuitry deposited thereon; PA1 (b) depositing and etching a first sacrificial layer to form a cavity for the paddle vane and a portion of the nozzle chamber; PA1 (c) depositing and etching a series of layers simultaneously forming the operational portions of the actuator means and the paddle vane; PA1 (d) depositing a second sacrificial layer forming a cavity for the ink chamber walls and remaining portions (if any) of the actuator; PA1 (e) depositing the chamber walls and remaining portions of the actuator; PA1 (f) forming a nozzle chamber roof including an ink ejection nozzle; P…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.