Monolithic scanning light emitting devices using micromachining
US6180428A · kind A · utility
198Cited by
10References
1Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 15, 1998 |
| Grant date | Jan 30, 2001 |
| Priority date | — |
| Expiry date | Oct 15, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H29/10
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-machined movable light emitting assembly is formed on or from an undoped or pure III-V substrate or formed on or from a doped III-V substrate. The movable light emitting assemblies are to be actuated using force generators, to generate the various mechanical degrees of freedom depending on the type of stage suspension and actuation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.